Title : Advantages of using high voltage glow discharge electron guns in nanoelectronic production
Abstract:
High Voltage Glow Discharge (HVGD) electron guns are widely used in the advanced branch of industry, including metallurgy, instrument-making and electronics. Such kind of guns can be successfully used for obtaining nanostructurized films and crystals, especially ceramics, which included active gas components. The distinguishing feature of such films and crystals is the high purity and stichometry. Especially effective such king of guns for obtaining the dielectric and piezoceramics films in microelectronic production, as well as for refining of refractory materials and volume 3-D printing technologies. The main advantages of HVGD electron guns are high stability of operation in the soft vacuum, simplicity of construction and realtive cheapness.
